JPH0487630U - - Google Patents
Info
- Publication number
- JPH0487630U JPH0487630U JP13024790U JP13024790U JPH0487630U JP H0487630 U JPH0487630 U JP H0487630U JP 13024790 U JP13024790 U JP 13024790U JP 13024790 U JP13024790 U JP 13024790U JP H0487630 U JPH0487630 U JP H0487630U
- Authority
- JP
- Japan
- Prior art keywords
- furnace body
- space
- surface treatment
- treatment apparatus
- reaction tube
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004381 surface treatment Methods 0.000 claims 2
- 239000012530 fluid Substances 0.000 claims 1
- 239000010453 quartz Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Electrodes Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13024790U JPH0487630U (en]) | 1990-11-30 | 1990-11-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13024790U JPH0487630U (en]) | 1990-11-30 | 1990-11-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0487630U true JPH0487630U (en]) | 1992-07-30 |
Family
ID=31877603
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13024790U Pending JPH0487630U (en]) | 1990-11-30 | 1990-11-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0487630U (en]) |
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1990
- 1990-11-30 JP JP13024790U patent/JPH0487630U/ja active Pending